rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Principles of plasma discharges and materials processing
  name:
    name part: Lieberman, M. A. (Michael A.)
    role:
      role term: creator
  name:
    name part: Lichtenberg, Allan J.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: nju
    date issued: 2005
    edition: 2nd ed.
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xxxv, 757 pages : illustrations ; 25 cm.
  note: Michael A. Lieberman, Allan J. Lichtenberg.
  note: Includes bibliographical references (pages 735-748) and index.
  subject:
    topic: Plasma dynamics
  subject:
    topic: Thin films
    topic: Surfaces
  subject:
    topic: Plasma etching
  subject:
    topic: Plasma chemistry
    topic: Industrial applications
  classification: QC718.5.D9 L54 2005
  classification: 530.4/4
  identifier: 0471720011 (acid-free paper)
  identifier: 2004058503
  record info:
    record content source: DLC
    record creation date: 041013
    record change date: 20151101063426.0
    record identifier: in00002052132