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Principles of plasma discharges and materials processing /

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Bibliographic Details
Main Author: Lieberman, M. A. (Michael A.)
Other Authors: Lichtenberg, Allan J.
Format: Book
Language:English
Published: Hoboken, N.J. : Wiley-Interscience, [2005]
Edition:2nd ed.
Subjects:
Plasma dynamics.
Thin films > Surfaces.
Plasma etching.
Plasma chemistry > Industrial applications.
Description
Physical Description:xxxv, 757 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages 735-748) and index.
ISBN:0471720011 (acid-free paper)