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Principles of lithography /

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Bibliographic Details
Main Author: Levinson, Harry J.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE Press, [2005]
Edition:2nd ed.
Subjects:
Integrated circuits > Design and construction.
Microlithography.
Online Access:Table of contents
Description
Physical Description:xii, 423 pages : illustrations (some color) ; 27 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819456608