Cleanroom design /
| Other Authors: | |
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| Format: | Book |
| Language: | English |
| Published: |
Chichester, West Sussex, England ; New York :
Wiley,
1999.
|
| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | Publisher description Table of Contents |
| Physical Description: | xii, 305 pages : illustrations ; 26 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0471942049 (pbk. : alk. paper) |