Cover Image

Micromachining technology for micro-optics and nano-optics III : 25-27 January 2005, San Jose, California, USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors: Johnson, Eric G. (Eric Gordon), Nordin, Gregory Packer, Suleski, Thomas J., 1969-
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2005]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5720.
Subjects:
Integrated optics > Congresses.
Miniature electronic equipment > Design and construction > Congresses.
Optoelectronic devices > Design and construction > Congresses.
Micromachining > Congresses.
Microelectromechanical systems > Congresses.
Nanotechnology > Congresses.
Description
Item Description:First conference has title: Micromachining technology for micro-optics.
Physical Description:xl, 282 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819456942