rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Reliability, packaging, testing, and characterization of MEMS/MOEMS IV
    sub title: 24-25 January 2005, San Jose, California, USA
  title info:
    title: Reliability, packaging, testing and characterization of MEMS/MOEMS four
  title info:
    title: Reliability, packaging, testing and characterization of MEMS/MOEMS 4
  title info:
    title: Reliability, testing and characterization of MEMS/MOEMS
  name:
    name part: Tanner, Danelle Mary
    name part: 1952-
  name:
    name part: Ramesham, Rajeshuni.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  name:
    name part: Semiconductor Equipment and Materials International
  name:
    name part: Solid State Technology (Organization)
  name:
    name part: Sandia National Laboratories
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2005
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xliii, 220 pages : illustrations ; 28 cm.
  note: Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organizations, SEMI--Semiconductor Equipment and materials International, Solid State Technology [and] Sandia National Laboratories (USA).
  note: Previous conferences entitled: Reliability, testing, and characterization of MEMS/MOEMS
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
    topic: Reliability
    genre: Congresses
  subject:
    topic: Microelectromechanical systems
    topic: Testing
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 5716
  identifier: 081945690X
  record info:
    record content source: LHL
    record creation date: 050419
    record change date: 20151101063830.0
    record identifier: in00002049312