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Force sensors for microelectronic packaging applications /

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Bibliographic Details
Main Author: Schwizer, Jürg
Other Authors: Mayer, M. (Michael Andreas), 1971-, Brand, Oliver, 1964-
Format: Book
Language:English
Published: Berlin ; New York : Springer, 2005.
Series:Microtechnology and MEMS.
Subjects:
Microelectronic packaging.
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by Schwizer, J.
Published 2005
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