rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Force sensors for microelectronic packaging applications
  name:
    name part: Schwizer, Jürg.
    role:
      role term: creator
  name:
    name part: Mayer, M. (Michael Andreas)
    name part: 1971-
  name:
    name part: Brand, Oliver
    name part: 1964-
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: gw
    date issued: 2005
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: viii, 178 pages : illustrations ; 25 cm.
  target audience: specialized
  note: J. Schwizer, M. Mayer, O. Brand.
  note: Includes bibliographical references (pages [165]-174) and index.
  subject:
    topic: Microelectronic packaging
  classification: 621.3'81046
  related item:
    title info:
      title: Microtechnology and MEMS
  identifier: 3540221875 (hbk.)
  record info:
    record content source: UKM
    record creation date: 040714
    record change date: 20151101053556.0
    record identifier: in00002038974