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Force sensors for microelectronic packaging applications /

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Bibliographic Details
Main Author: Schwizer, Jürg
Other Authors: Mayer, M. (Michael Andreas), 1971-, Brand, Oliver, 1964-
Format: Book
Language:English
Published: Berlin ; New York : Springer, 2005.
Series:Microtechnology and MEMS.
Subjects:
Microelectronic packaging.
Description
Physical Description:viii, 178 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages [165]-174) and index.
ISBN:3540221875 (hbk.)