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High dielectric constant materials : VLSI MOSFET applications /

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Bibliographic Details
Other Authors: Huff, Howard R., Gilmer, D. C. (David C.)
Format: Book
Language:English
Published: Berlin ; New York : Springer, 2005.
Series:Springer series in advanced microelectronics ; 16.
Subjects:
Integrated circuits > Very large scale integration > Materials.
Semiconductors > Materials.
Metal oxide semiconductor field-effect transistors > Materials.
Gate array circuits > Materials > Congresses.
Dielectrics.
Description
Physical Description:xxiv, 710 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3540210814 (hbk.)
ISSN:1437-0387 ;