MEMS mechanical sensors /

Mechanics of microelectromechanical systems /
by: Lobontiu, Nicolae
Published: (2005)

Multi-wafer rotating MEMS machines : turbines, generators, and engines /
Published: (2009)

CMOS-MEMS /
Published: (2005)

Smart material systems and MEMS : design and development methodologies /
by: Varadan, V. K., 1943-
Published: (2006)

Introduction to microelectromechanical systems engineering /
by: Maluf, Nadim
Published: (2004)

Microsystems technology : fabrication, test & reliability /
Published: (2003)

Silicon carbide microsystems for harsh environments /
by: Wijesundara, Muthu B. J.
Published: (2011)

Microsystems.

Smart mems and sensor systems /
by: Gaura, Elena
Published: (2006)

RF MEMS : theory, design, and technology /
by: Rebeiz, Gabriel M.
Published: (2003)

MEMS mechanical sensors /
Published: (2004)

Numerical simulation of mechatronic sensors and actuators /
by: Kaltenbacher, Manfred, 1968-
Published: (2007)

BioNanoFluidic MEMS /
Published: (2008)

MEMS : a practical guide to design, analysis, and applications /
Published: (2006)

MEMS : a practical guide to design, analysis, and applications /
Published: (2006)

Introductory MEMS : fabrication and applications /
by: Adams, Thomas M. (Thomas McDaniel)
Published: (2010)

BioMEMS /
Published: (2006)

Dynamics of microelectromechanical systems /
by: Lobontiu, Nicolae
Published: (2007)

Self assembly : the science of things that put themselves together /
by: Pelesko, John A.
Published: (2007)

Fundamentals of microfabrication and nanotechnology /
by: Madou, Marc J.
Published: (2011)

Handbook of silicon based MEMS materials and technologies /
Published: (2015)

A guide to hands-on MEMS design and prototyping /
by: Kubby, Joel A.
Published: (2011)

Inertial MEMS : principles and practice /
by: Kempe, Volker
Published: (2011)

MEMS : applications /
Published: (2006)

Radioisotope thin-film powered microsystems /
Published: (2010)

MEMS and nanotechnology for gas sensors /
by: Roy, Sunipa, et al.
Published: (2016)

MEMS and nanotechnology. proceedings of the 2011 Annual Conference on Experimental and Applied Mechanics /
Published: (2011)

MEMS and nanotechnology. proceedings of the 2010 annual conference on experimental and applied mechanics /
Published: (2011)

Microsensors, MEMS, and smart devices /
by: Gardner, J. W. (Julian W.), 1958-
Published: (2001)

Photonic microsystems : micro and nanotechnology applied to optical devices and systems /
by: Solgaard, Olav
Published: (2009)

Sensor science and technology /
Published: (2017)

RF MEMS switches and integrated switching circuits : design, fabrication, and test /
by: Liu, Ai-Qun
Published: (2010)

Thermal nanosystems and nanomaterials /
Published: (2009)

Low-power crystal and MEMS oscillators : the experience of watch developments /
by: Vittoz, Eric A., 1938-
Published: (2010)

Digital holography for MEMS and microsystem metrology /
Published: (2011)

Microsensors, MEMS, and smart devices /
by: Gardner, J. W. (Julian W.), 1958-
Published: (2001)