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MEMS mechanical sensors /

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Bibliographic Details
Corporate Author: NetLibrary, Inc
Other Authors: Beeby, Stephen
Format: eBook
Language:English
Published: Boston : Artech House, [2004]
Series:Microelectromechanical systems series.
Subjects:
Microelectromechanical systems.
Detectors.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:Electronic resource.
Physical Description:x, 269 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1580538738 (electronic bk.)