rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Integration of advanced micro- and nanoelectronic devices--critical issues and solutions
    sub title: symposia held April 13-16, 2004, San Francisco, California, U.S.A
  title info:
    title: High-k insulators and ferroelectrics for advanced microelectronic devices
  title info:
    title: Integration challenges in next-generation oxide-based nanoelectronics
  name:
    name part: Morais, J.
  name:
    name part: Materials Research Society
    name part: Fall Meeting
    name part: (2004 : San Francisco, Calif.)
  name:
    name part: Symposium on High-k Insulators and Ferroelectrics for Advanced Microelctronic Devices (2004 : Francisco, Calif.)
  name:
    name part: Symposium on Integration Challenges in Next-Generation Oxide-Based Nanoelectronics (2004 : Francisco, Calif.)
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: pau
    date issued: 2004
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xv, 471 pages : illustrations ; 24 cm.
  note: editors: J. Morais [and others].
  note: "This volume is the joint proceedings of papers presented in Symposium D, 'High-k Insulators and Ferroelectrics for Advanced Microelectronic Devices,' and Symposium E, 'Integration Challenges in Next-Generation Oxide-Based Nanoelectronics,' held April 13-16 at the 2004 MRS Spring Meeting in San Francisco, California"--p. xv.
  note: Includes bibliographical references and indexes.
  subject:
    topic: Microelectronics
    topic: Equipment and supplies
    genre: Congresses
  subject:
    topic: Nanotechnology
    genre: Congresses
  subject:
    topic: Nanostructured materials
    topic: Design and construction
    genre: Congresses
  subject:
    topic: Ferroelectric devices
    genre: Congresses
  related item:
    title info:
      title: Materials Research Society symposia proceedings ; v. 811
  identifier: 155899761X
  record info:
    record content source: LHL
    record creation date: 040920
    record change date: 20151031161655.0
    record identifier: in00002023086