http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Integration of advanced micro- and nanoelectronic devices--critical issues and solutions
symposia held April 13-16, 2004, San Francisco, California, U.S.A
High-k insulators and ferroelectrics for advanced microelectronic devices
Integration challenges in next-generation oxide-based nanoelectronics
Symposium on High-k Insulators and Ferroelectrics for Advanced Microelctronic Devices (2004 : Francisco, Calif.)
Symposium on Integration Challenges in Next-Generation Oxide-Based Nanoelectronics (2004 : Francisco, Calif.)
"This volume is the joint proceedings of papers presented in Symposium D, 'High-k Insulators and Ferroelectrics for Advanced Microelectronic Devices,' and Symposium E, 'Integration Challenges in Next-Generation Oxide-Based Nanoelectronics,' held April 13-16 at the 2004 MRS Spring Meeting in San Francisco, California"--p. xv.
Includes bibliographical references and indexes.
Materials Research Society symposia proceedings ; v. 811