Integration of advanced micro- and nanoelectronic devices--critical issues and solutions : symposia held April 13-16, 2004, San Francisco, California, U.S.A. /

Bibliographic Details
Corporate Authors:	Materials Research Society. Fall Meeting, Symposium on High-k Insulators and Ferroelectrics for Advanced Microelctronic Devices, Symposium on Integration Challenges in Next-Generation Oxide-Based Nanoelectronics
Other Authors:	Morais, J.
Format:	Conference Proceeding Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [2004]
Series:	Materials Research Society symposia proceedings ; v. 811.
Subjects:	Microelectronics > Equipment and supplies > Congresses. Nanotechnology > Congresses. Nanostructured materials > Design and construction > Congresses. Ferroelectric devices > Congresses.

Description
Item Description:	"This volume is the joint proceedings of papers presented in Symposium D, 'High-k Insulators and Ferroelectrics for Advanced Microelectronic Devices,' and Symposium E, 'Integration Challenges in Next-Generation Oxide-Based Nanoelectronics,' held April 13-16 at the 2004 MRS Spring Meeting in San Francisco, California"--p. xv.
Physical Description:	xv, 471 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographical references and indexes.
ISBN:	155899761X