Fifth International Symposium on Laser Precision Microfabrication : 11-14 May 2004, Nara, Japan /
| Corporate Authors: | , , , , |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2004]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 5662. |
| Subjects: |
| Physical Description: | xxi, 770 pages : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819456233 |