Silicon front-end junction formation--physics and technology : symposium held April 13-15, 2004, San Francisco, California, U.S.A. /
| Corporate Authors: | , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Warrendale, Pa. :
Materials Research Society,
[2004]
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| Series: | Materials Research Society symposia proceedings ;
v. 810. |
| Subjects: |
| Item Description: | "... Symposium C, "Silicon Front-End Junction Formation--Physics and Technology," was held April 13-15 at the 2004 MRS Spring Meeting in San Francisco, California."--p. xv. |
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| Physical Description: | xvi, 494 pages : illustrations ; 24 cm. |
| Bibliography: | Includes bibliographical references and indexes. |
| ISBN: | 1558997601 |