Fundamentals of semiconductor fabrication /

Bibliographic Details
Main Author:	May, Gary S.
Other Authors:	Sze, S. M., 1936-
Format:	Book
Language:	English
Published:	New York : John Wiley & Sons, [2004]. ©2004.
Subjects:	Semiconductors > Design and construction.

Description
Physical Description:	xiii, 305 pages : illustrations ; 26 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0471232793 9780471232797 0471452386 9780471452386