APA (7th ed.) Citation

European Conference on Mask Technology for Integrated Circuits and Microcomponents Dresden, Germany, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Institut für Mikrostrukturtechnik, Semiconductor Equipment and Materials International, Europe, Society of Photo-optical Instrumentation Engineers, & Behringer, U. F. W. (2004). 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents: 12-14 January 2004, Dresden, Germany. SPIE.

Chicago Style (17th ed.) Citation

European Conference on Mask Technology for Integrated Circuits and Microcomponents Dresden, Germany, Mikro- und Feinwerktechnik VDE/VDI-Gesellschaft für Mikroelektronik, Institut für Mikrostrukturtechnik, Europe Semiconductor Equipment and Materials International, Society of Photo-optical Instrumentation Engineers, and Uwe F. W. Behringer. 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents: 12-14 January 2004, Dresden, Germany. Bellingham, Washington: SPIE, 2004.

MLA (9th ed.) Citation

European Conference on Mask Technology for Integrated Circuits and Microcomponents Dresden, Germany, et al. 20th European Conference on Mask Technology for Integrated Circuits and Microcomponents: 12-14 January 2004, Dresden, Germany. SPIE, 2004.