rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Wafer bonding
    sub title: applications and technology
  name:
    name part: Alexe, M. (Marin)
  name:
    name part: Gösele, U.
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: gw
    date issued: 2004
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xv, 499 pages : illustrations (some color) ; 25 cm.
  note: M. Alexe, U. Gösele (eds.).
  note: Includes bibliographical references and index.
  subject:
    topic: Semiconductors
    topic: Bonding
  subject:
    topic: Semiconductor wafers
  classification: TK7871.85 .W27 2004
  classification: 621.3815/2
  related item:
    title info:
      title: Springer series in materials science ; 75
  identifier: 3540210490 (alk. paper)
  identifier: 2004046626
  record info:
    record content source: DLC
    record creation date: 040302
    record change date: 20151031111118.0
    record identifier: in00001991663