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Testing, reliability, and application of micro- and nano-material systems II : 15-17 March 2004, San Diego, California, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Meyendorf, Norbert, Baaklini, George Y., Michel, Bernd, 1949-
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2004]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5392.
Subjects:
Electrooptical devices > Materials > Testing > Congresses.
Photonics > Materials > Testing > Congresses.
Nanostructured materials > Testing > Congresses.
Microelectromechanical systems > Testing > Congresses.
Description
Physical Description:viii, 272 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819453099