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Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia /

Bibliographic Details
Corporate Authors:	ICMNE-2003 Zvenigorod, Russia, Society of Photo-optical Instrumentation Engineers, Society of Photo-optical Instrumentation Engineers. Russian Chapter, Fiziko-tekhnologicheskiĭ institut (Rossiĭskai͡a akademii͡a nauk), Russia (Federation). Ministerstvo promyshlennosti, nauki i tekhnologiĭ
Other Authors:	Valiev, Kamilʹ Akhmetovich, Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich)
Format:	Conference Proceeding Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2004]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5401.
Subjects:	Microelectronics > Congresses. Nanotechnology > Congresses. Lithography > Congresses. Photonics > Materials > Congresses.

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