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Micro- and nano-electronics 2003 : 6-10 October 2003, Zvenigorod, Russia /

Bibliographic Details
Corporate Authors: ICMNE-2003 Zvenigorod, Russia, Society of Photo-optical Instrumentation Engineers, Society of Photo-optical Instrumentation Engineers. Russian Chapter, Fiziko-tekhnologicheskiĭ institut (Rossiĭskai͡a akademii͡a nauk), Russia (Federation). Ministerstvo promyshlennosti, nauki i tekhnologiĭ
Other Authors: Valiev, Kamilʹ Akhmetovich, Orlikovskiĭ, A. A. (Aleksandr Aleksandrovich)
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Washington : SPIE, [2004]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5401.
Subjects:
Microelectronics > Congresses.
Nanotechnology > Congresses.
Lithography > Congresses.
Photonics > Materials > Congresses.
Description
Item Description:"Selected papers ... ICMNE-2003"--P. xvii.
Physical Description:xvii, 762 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819453242