APA (7th ed.) Citation

ICMNE-2003 Zvenigorod, Russia, Society of Photo-optical Instrumentation Engineers, Society of Photo-optical Instrumentation Engineers. Russian Chapter, Fiziko-tekhnologicheskiĭ institut (Rossiĭskai͡a akademii͡a nauk), Russia (Federation). Ministerstvo promyshlennosti, nauki i tekhnologiĭ, Valiev, K. A., & Orlikovskiĭ, A. A. (2004). Micro- and nano-electronics 2003: 6-10 October 2003, Zvenigorod, Russia. SPIE.

Chicago Style (17th ed.) Citation

ICMNE-2003 Zvenigorod, Russia, Society of Photo-optical Instrumentation Engineers, Society of Photo-optical Instrumentation Engineers. Russian Chapter, Fiziko-tekhnologicheskiĭ institut (Rossiĭskai͡a akademii͡a nauk), nauki i tekhnologiĭ Russia (Federation). Ministerstvo promyshlennosti, Kamilʹ Akhmetovich Valiev, and A. A. Orlikovskiĭ. Micro- and Nano-electronics 2003: 6-10 October 2003, Zvenigorod, Russia. Bellingham, Washington: SPIE, 2004.

MLA (9th ed.) Citation

ICMNE-2003 Zvenigorod, Russia, et al. Micro- and Nano-electronics 2003: 6-10 October 2003, Zvenigorod, Russia. SPIE, 2004.