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Thin film materials technology : sputtering of compound materials /

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Bibliographic Details
Main Author: Wasa, Kiyotaka
Other Authors: Kitabatake, Makoto, Adachi, Hideaki
Format: Book
Language:English
Published: Norwich, NY : Heidelberg : Springer, William Andrew Pub. ; [date of publication not identified]
Subjects:
Cathode sputtering (Plating process)
Thin films.
Online Access:Table of contents
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