Thin film materials technology : sputtering of compound materials /

Bibliographic Details

Main Author:	Wasa, Kiyotaka
Other Authors:	Kitabatake, Makoto, Adachi, Hideaki
Format:	Book
Language:	English
Published:	Norwich, NY : Heidelberg : Springer, William Andrew Pub. ; [date of publication not identified]
Subjects:	Cathode sputtering (Plating process) Thin films.
Online Access:	Table of contents