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| LEADER |
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| 001 |
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| 005 |
20220105141219.0 |
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| 007 |
cr cn- |
| 008 |
031006s2002 caua sb 001 0 eng d |
| 020 |
|
|
|a 0585470979 (electronic bk.)
|
| 035 |
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|a (OCoLC)ocm53151359
|
| 040 |
|
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|d UtOrBLW
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|a IICC
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| 050 |
1 |
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|a TA418.9.T45
|b O47 2002eb
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| 082 |
0 |
4 |
|a 621.3815/2
|2 22
|
| 100 |
1 |
|
|a Ohring, Milton,
|d 1936-
|0 http://id.loc.gov/authorities/names/n91018108
|
| 245 |
1 |
0 |
|a Materials science of thin films :
|b deposition and structure /
|c Milton Ohring.
|
| 250 |
|
|
|a 2nd ed.
|
| 264 |
|
1 |
|a San Diego, CA :
|b Academic Press,
|c 2002.
|
| 300 |
|
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|a xxi, 794 pages :
|b illustrations
|
| 336 |
|
|
|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a computer
|b c
|2 rdamedia
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| 338 |
|
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|a online resource
|b cr
|2 rdacarrier
|
| 504 |
|
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|a Includes bibliographical references and index.
|
| 505 |
0 |
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|a A review of materials science -- Vacuum science and technology -- Thin-film evaporation processes -- Discharges, plasmas, and ion-surface interactions -- Plasma and ion beam processing of thin films -- Chamical vapor deposition -- Substrate surfaces and thin-film nucleation -- Epitaxy -- Film structure -- Characterixation of thin films and surfaces -- Interdiffusion, reactions, and transformations in thin films -- Mechanical properties of thin films.
|
| 533 |
|
|
|a Electronic reproduction.
|b Boulder, Colo. :
|c NetLibrary,
|d 2003.
|n Available via World Wide Web.
|n Access may be limited to NetLibrary affiliated libraries.
|
| 500 |
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|a Electronic resource.
|
| 650 |
|
0 |
|a Thin films.
|0 http://id.loc.gov/authorities/subjects/sh85134864
|
| 655 |
|
7 |
|a Electronic books.
|2 local
|
| 710 |
2 |
|
|a NetLibrary, Inc.
|0 http://id.loc.gov/authorities/names/no99080690
|
| 776 |
1 |
|
|c Original
|z 0125249756
|w (DLC) 2001089414
|w (OCoLC)48463437
|
| 856 |
4 |
1 |
|u https://proxy.library.tamu.edu/login?url=http://www.netLibrary.com/urlapi.asp?action=summary&v=1&bookid=92177
|z Connect to the full text of this electronic book
|t 0
|
| 994 |
|
|
|a 92
|b IIC
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| 999 |
|
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|a MARS
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| 999 |
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|t 0
|
| 952 |
f |
f |
|a Texas A&M University
|b College Station
|c Electronic Resources
|d Available Online
|t 0
|e TA418.9.T45 O47 2002eb
|h Library of Congress classification
|
| 998 |
f |
f |
|a TA418.9.T45 O47 2002eb
|t 0
|l Available Online
|