Materials science of thin films : deposition and structure /
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| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
San Diego, CA :
Academic Press,
2002.
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| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
| Item Description: | Electronic resource. |
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| Physical Description: | xxi, 794 pages : illustrations |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0585470979 (electronic bk.) |