Cover Image

Micromachining technology for micro-optics and nano-optics II : 27-29 January 2004, San Jose, California, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Johnson, Eric G. (Eric Gordon), Nordin, Gregory Packer
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2004]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5347.
Subjects:
Integrated optics > Congresses.
Miniature electronic equipment > Design and construction > Congresses.
Optoelectronic devices > Design and construction > Congresses.
Micromachining > Congresses.
Microelectromechanical systems > Congresses.
Nanotechnology > Congresses.
Description
Item Description:Earlier conference has title: Micromachining technology for micro-optics.
Physical Description:xxix, 288 pages : illustrations (some color) ; 28 cm.
Bibliography:Includes bibliographical references and author index.
ISBN:0819452556