http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Reliability, testing, and characterization of MEMS/MOEMS III
26-28 January 2004, San Jose, California, USA
Reliability, testing and characterization of MEMS/MOEMS three
Reliability, testing and characterization of MEMS/MOEMS 3
Society of Photo-optical Instrumentation Engineers
xxxi, 312 pages : illustrations ; 28 cm.
Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Includes bibliographical references and index.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5343