rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Reliability, testing, and characterization of MEMS/MOEMS III
    sub title: 26-28 January 2004, San Jose, California, USA
  title info:
    title: Reliability, testing and characterization of MEMS/MOEMS three
  title info:
    title: Reliability, testing and characterization of MEMS/MOEMS 3
  name:
    name part: Tanner, Danelle Mary
    name part: 1952-
  name:
    name part: Ramesham, Rajeshuni.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2004
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xxxi, 312 pages : illustrations ; 28 cm.
  note: Danelle M. Tanner, Rajeshuni Ramesham, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
  note: Includes bibliographical references and index.
  subject:
    topic: Microelectromechanical systems
    topic: Reliability
    genre: Congresses
  subject:
    topic: Microelectromechanical systems
    topic: Testing
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 5343
  identifier: 0819452513
  record info:
    record content source: LHL
    record creation date: 040310
    record change date: 20151026071552.0
    record identifier: in00001838609