Chemical-mechanical planarization of semiconductor materials /

Bibliographic Details
Other Authors:	Oliver, M. R. (Michael R.), 1943-
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer, [2004]
Series:	Springer series in materials science ; v. 69.
Subjects:	Semiconductors > Materials. Grinding and polishing.

Description
Physical Description:	x, 425 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographical references.
ISBN:	3540431810 (alk. paper)
ISSN:	0933-033X ;