APA (7th ed.) Citation

Oliver, M. R. (2004). Chemical-mechanical planarization of semiconductor materials. Springer.

Chicago Style (17th ed.) Citation

Oliver, M. R. Chemical-mechanical Planarization of Semiconductor Materials. Berlin ; New York: Springer, 2004.

MLA (9th ed.) Citation

Oliver, M. R. Chemical-mechanical Planarization of Semiconductor Materials. Springer, 2004.