Epitaxy : physical principles and technical implementation /

Bibliographic Details
Main Author:	Herman, Marian A.
Other Authors:	Richter, Wolfgang, 1940-, Sitter, Helmut, 1951-
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer, [2004]
Series:	Springer series in materials science ; v. 62.
Subjects:	Epitaxy. Thin films, Multilayered > Technique.

Description
Physical Description:	xv, 522 pages : illustrations ; 24 cm.
Bibliography:	Includes bibliographical references (pages [467]-499) and index.
ISBN:	3540678212 (acid-free paper)
ISSN:	0933-033X ;