APA (7th ed.) Citation

Herman, M. A., Richter, W., & Sitter, H. (2004). Epitaxy: Physical principles and technical implementation. Springer.

Chicago Style (17th ed.) Citation

Herman, Marian A., Wolfgang Richter, and Helmut Sitter. Epitaxy: Physical Principles and Technical Implementation. Berlin ; New York: Springer, 2004.

MLA (9th ed.) Citation

Herman, Marian A., et al. Epitaxy: Physical Principles and Technical Implementation. Springer, 2004.