Cover Image

MEMS mechanical sensors /

Show other versions (1)
Bibliographic Details
Other Authors: Beeby, Stephen
Format: Book
Language:English
Published: Boston : Artech House, [2004]
Series:Microelectromechanical systems series.
Subjects:
Microelectromechanical systems.
Detectors.
Description
Physical Description:x, 269 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:1580535364 (alk. paper)