MicroNano integration /

Bibliographic Details
Other Authors: Knobloch, Harald, Kaminorz, Yvette
Format: Book
Language:English
Published: Berlin ; New York : Springer, [2004]
Series:Engineering online library.
Subjects:
Description
Physical Description:302 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and index.
ISBN:3540202528 (alk. paper)