APA (7th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Kimmel, K. R., & Staud, W. (2003). 23rd Annual BACUS Symposium on Photomask Technology: 9-12 September, 2003, Monterey, California, USA. SPIE.

Chicago Style (17th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, BACUS (Technical group), Society of Photo-optical Instrumentation Engineers, Kurt Rudolf Kimmel, and Wolfgang Staud. 23rd Annual BACUS Symposium on Photomask Technology: 9-12 September, 2003, Monterey, California, USA. Bellingham, Washington: SPIE, 2003.

MLA (9th ed.) Citation

Symposium on Photomask Technology Monterey, Calif, et al. 23rd Annual BACUS Symposium on Photomask Technology: 9-12 September, 2003, Monterey, California, USA. SPIE, 2003.