APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Kley, E., & Herzig, H. P. (2003). Lithographic and micromachining techniques for optical component fabrication II: 3-4 August 2003, San Diego, California, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Ernst-Bernhard Kley, and Hans Peter Herzig. Lithographic and Micromachining Techniques for Optical Component Fabrication II: 3-4 August 2003, San Diego, California, USA. Bellingham, Washington: SPIE, 2003.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Lithographic and Micromachining Techniques for Optical Component Fabrication II: 3-4 August 2003, San Diego, California, USA. SPIE, 2003.