Advances in mirror technology for X-ray, EUV lithography, laser and other applications : 7-8 August 2003, San Diego, California, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Khounsary, Ali M., Dinger, Udo, Ota, Kazuya
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2004]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 5198.
Subjects:	Mirrors > Design and construction > Congresses. Lasers > Mirrors > Design and construction > Congresses. Optical coatings > Congresses. Optical radiometry > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/5198.toc?SSO=1

Description
Physical Description:	ix, 222 pages : illustrations (some color) ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	0819450669