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Interlayer dielectrics for semiconductor technologies /

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Bibliographic Details
Other Authors: Murarka, S. P., Eizenberg, M., Sinha, A. K.
Format: Book
Language:English
Published: Amsterdam ; Boston : Elsevier/Academic Press, [2003]
Subjects:
Semiconductor wafers.
Dielectrics.
Description
Physical Description:xiv, 444 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages 425-[427]) and index.
ISBN:0125112211