APA (7th ed.) Citation

Murarka, S. P., Eizenberg, M., & Sinha, A. K. (2003). Interlayer dielectrics for semiconductor technologies. Elsevier/Academic Press.

Chicago Style (17th ed.) Citation

Murarka, S. P., M. Eizenberg, and A. K. Sinha. Interlayer Dielectrics for Semiconductor Technologies. Amsterdam ; Boston: Elsevier/Academic Press, 2003.

MLA (9th ed.) Citation

Murarka, S. P., et al. Interlayer Dielectrics for Semiconductor Technologies. Elsevier/Academic Press, 2003.