Fourth International Symposium on Laser Precision Microfabrication : 21-24 June 2003, Munich, Germany /

Bibliographic Details
Corporate Authors: International Symposium on Laser Precision Microfabrication Munich, Germany, Japan Laser Processing Society, Seiki Gakkai (Japan)
Other Authors: Miyamoto, Isamu
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Washington : SPIE, [2003]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5063.
Subjects:
Description
Physical Description:xv, 532 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819448699