Fourth International Symposium on Laser Precision Microfabrication : 21-24 June 2003, Munich, Germany /
| Corporate Authors: | , , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Bellingham, Washington :
SPIE,
[2003]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 5063. |
| Subjects: |
| Physical Description: | xv, 532 pages : illustrations ; 28 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819448699 |