2003 International Symposium on Microelectronics : IMAPS : proceedings : Novermber 18-20, 2003, Hynes Convention Center, Boston, MA /
| Corporate Authors: | , , , |
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| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Washington, D.C. : Bellingham, Washington :
IMAPS ; SPIE,
[2003]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 5288. |
| Subjects: |
| Physical Description: | xxi, 1013 pages : illustrations, portraits ; 28 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0930815718 (IMAPS) 0819451894 |