Optimal synthesis methods for MEMS /
| Main Author: | |
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| Format: | Book |
| Language: | English |
| Published: |
Boston :
Kluwer Academic Publishers,
[2003]
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| Series: | Kluwer international series in microsystems.
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| Subjects: |
| Physical Description: | 320 pages : illustrations ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1402076207 |