http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Semiconductor microelectronics and nanoelectronics programs
National Institute of Standards and Technology (U.S.)
edited by Stephen Knight, Joaquin V. Martinez de Pinillos, and Michele Buckley.
Also available via Internet from the NIST web site. Address as of 1/22/04: http://www.eeel.nist.gov/omp/Portfolio%202003/F%5Fomp.pdf; current access is available via PURL.
Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., 2003 2 microfiches : negative.