rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Semiconductor microelectronics and nanoelectronics programs
  name:
    name part: Knight, Stephen.
  name:
    name part: Pinillos, Joaquin V. Martinez de.
  name:
    name part: Buckley, Michele.
  name:
    name part: National Institute of Standards and Technology (U.S.)
  type of resource: text
  genre: bibliography
  origin info:
    place:
      place term: mdu
    date issued: 2003
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: microfiche
    extent: vii, 168 pages : illustrations ; 28 cm.
  note: edited by Stephen Knight, Joaquin V. Martinez de Pinillos, and Michele Buckley.
  note: "July 2003."
  note: Shipping list number: 2004-0094-M.
  note: Shipping List Date: 12/22/2003
  note: Microform.
  note: Also available via Internet from the NIST web site. Address as of 1/22/04: http://www.eeel.nist.gov/omp/Portfolio%202003/F%5Fomp.pdf; current access is available via PURL.
  note: Microfiche. [Washington, D.C.] : Supt. of Docs., U.S. G.P.O., 2003 2 microfiches : negative.
  note: Includes bibliographical references.
  subject:
    name:
      name part: National Institute of Standards and Technology (U.S.)
  subject:
    topic: Semiconductors
    topic: Measurement
  subject:
    topic: Nanotechnology
    topic: Research
  subject:
    topic: Molecular electronics
    topic: Research
  subject:
    topic: Microelectronics
    topic: Research
  classification: C 13.58:7010
  related item:
    title info:
      title: NISTIR ; 7010
  identifier: https://purl.fdlp.gov/GPO/LPS42647
  related item:
    location:
      url: https://purl.fdlp.gov/GPO/LPS42647
  record info:
    record content source: GPO
    record creation date: 031229
    record change date: 20211202201041.0
    record identifier: in00001805851