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Materials, technology and reliability for advanced interconnects and low-k dielectrics, 2003 : symposium held April 21-25, 2003, San Francisco, California, U.S.A /

Bibliographic Details
Corporate Authors: Materials Research Society. Fall Meeting, Symposim on Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics
Other Authors: McKerrow, Andrew J.
Format: Conference Proceeding Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2003]
Series:Materials Research Society symposia proceedings ; v. 766.
Subjects:
Semiconductors > Materials > Congresses.
Semiconductors > Junctions > Congresses.
Dielectric films > Congresses.
Integrated circuits > Materials > Congresses.
Integrated circuits > Reliability > Congresses.
Description
Item Description:"Symposium E, 'Materials, Technology and Reliability for Advanced Interconnects and Low-k Dielectrics,' was held April 23-25 at the 2003 MRS Spring Meeting in San Francisco, California."--p. xv.
Physical Description:xv, 515 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographic references and indexes.
ISBN:1558997032