rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Characterization and metrology for ULSI technology
    sub title: 2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003
  name:
    name part: Seiler, David G.
  name:
    name part: International Conference on Characterization and Metrology for ULSI Technology (2003 : Austin, Tex.)
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: nyu
    date issued: 2003
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: xviii, 818 pages : illustrations ; 28 cm. + 1 CD-ROM (4 3/4 in.)
  note: editors, David G. Seiler [and others].
  note: "The 2003 International Conference on Characterization and Metrology for ULSI Technology was held at the J.J. Pickle Research Campus, University of Texas, Austin, TX, from March 24 through March 28, 2003"--pref.
  note: Accompanying computer disc contains full text from the book.
  note: Includes bibliographical references and index.
  subject:
    topic: Integrated circuits
    topic: Ultra large scale integration
    genre: Congresses
  subject:
    topic: Integrated circuits
    topic: Ultra large scale integration
    genre: Congresses
    genre: Software
  related item:
    title info:
      title: AIP conference proceedings ; no. 683
  identifier: 0735401527 (set)
  record info:
    record content source: GZM
    record creation date: 031029
    record change date: 20151025205806.0
    record identifier: in00001800211