http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Characterization and metrology for ULSI technology
2003 International Conference on Characterization and Metrology for ULSI Technology, Austin, Texas, 24-28 March 2003
International Conference on Characterization and Metrology for ULSI Technology (2003 : Austin, Tex.)
xviii, 818 pages : illustrations ; 28 cm. + 1 CD-ROM (4 3/4 in.)
"The 2003 International Conference on Characterization and Metrology for ULSI Technology was held at the J.J. Pickle Research Campus, University of Texas, Austin, TX, from March 24 through March 28, 2003"--pref.
Accompanying computer disc contains full text from the book.
Includes bibliographical references and index.