Cover Image

Surface scattering and diffraction III : 4-6 August 2003, San Diego, California, USA /

Bibliographic Details
Corporate Author: Society of Photo-optical Instrumentation Engineers
Other Authors: Gu, Zu-Han, Maradudin, Alexei A., 1931-
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2003]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5189.
Subjects:
Surface roughness > Measurement > Congresses.
Diffractive scattering > Congresses.
Optical measurements > Congresses.
Scattering (Physics) > Congresses.
Metrology > Congresses.
Description
Item Description:Previous symposia entitled: Surface scattering and diffraction for advanced metrology.
Physical Description:vii, 198 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819450626