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Smart structures and materials 2003. 3-5 March 2003, San Diego, California, USA / Smart electronics, MEMS, bioMEMS, and nanotechnology :

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Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, American Society of Mechanical Engineers, United States. Air Force. Office of Scientific Research
Other Authors: Varadan, V. K., 1943-, Kish, Laszlo B.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2002]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 5055.
Subjects:
Microelectronics > Materials > Congresses.
Smart materials > Congresses.
Microelectromechanical systems > Congresses.
Actuators > Congresses.
Nanotechnology > Congresses.
Biotechnology > Congresses.
Description
Item Description:Previous conference has subtitle: Smart electronics, MEMS, and nanotechnology.
Physical Description:xxiii, 394 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819448605