http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
Cost and performance in integrated circuit creation
27-28 February 2003, Santa Clara, California, USA
Society of Photo-optical Instrumentation Engineers
Alfred K.K. Wong, Kevin M. Monahan, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
Includes bibliographical references and index.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 5043