rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Cost and performance in integrated circuit creation
    sub title: 27-28 February 2003, Santa Clara, California, USA
  name:
    name part: Wong, Alfred Kwok-Kit.
  name:
    name part: Monahan, Kevin M.
  name:
    name part: Society of Photo-optical Instrumentation Engineers
  type of resource: text
  genre: bibliography
  genre: conference publication
  origin info:
    place:
      place term: wau
    date issued: 2003
    issuance: monographic
  language:
    language term: eng
  physical description:
    form: print
    extent: vii, 186 pages : illustrations ; 28 cm.
  note: Alfred K.K. Wong, Kevin M. Monahan, chairs/editors ; sponsored ... by SPIE--the International Society for Optical Engineering.
  note: Includes bibliographical references and index.
  subject:
    topic: Integrated circuits
    topic: Design and construction
    topic: Costs
    genre: Congresses
  subject:
    topic: Integrated circuits
    topic: Defects
    topic: Analysis
    genre: Congresses
  subject:
    topic: Semiconductors
    topic: Design and construction
    topic: Costs
    genre: Congresses
  subject:
    topic: Semiconductor wafers
    topic: Defects
    topic: Analysis
    genre: Congresses
  subject:
    topic: Microelectronics industry
    topic: Quality control
    genre: Congresses
  related item:
    title info:
      title: Proceedings of SPIE--the International Society for Optical Engineering ; v. 5043
  identifier: 0819448486
  record info:
    record content source: TEF
    record creation date: 030728
    record change date: 20151025095939.0
    record identifier: in00001791118