rdf-syntax-grammar
mods:
  schema location: http://www.loc.gov/mods/v3 http://www.loc.gov/standards/mods/v3/mods-3-2.xsd
  title info:
    title: Annual IEEE/CPMT/SEMI International Electronics Manufacturing Technology Symposium
    sub title: [proceedings]
  title info:
    title: IEEE/CPMT/SEMI ... International Electronics Manufacturing Technology Symposium
  title info:
    title: Annual IEEE/SEMI 2002
  title info:
    title: IEMT
  title info:
    title: International Electronics Manufacturing Technology Symposium
  name:
    name part: IEEE/CPMT/SEMI International Electronics Manufacturing Technology Symposium.
    role:
      role term: creator
  name:
    name part: Semiconductor Equipment and Materials International
  name:
    name part: Components, Packaging & Manufacturing Technology Society
  name:
    name part: Institute of Electrical and Electronics Engineers
  type of resource: text
  genre: conference publication
  origin info:
    place:
      place term: nju
    date issued: 2002
    date issued: 9999
    issuance: continuing
    frequency: Annual
  language:
    language term: eng
  physical description:
    form: print
    extent: volumes : illustrations ; 28 cm.
  note: Also available by subscription, in PDF format, via the World Wide Web.
  subject:
    topic: Electronic industries
    genre: Congresses
  subject:
    topic: Electronic packaging
    genre: Congresses
  subject:
    topic: Electronic apparatus and appliances
    topic: Design and construction
    genre: Congresses
  related item:
    title info:
      title: IEEE/CPMT International Electronics Manufacturing Symposium : [proceedings]
    name:
      name part: IEEE/CPMT International Electronics Manufacturing Technology Symposium.
    identifier: 1089-8190
    identifier: (DLC)sn 96004273
    identifier: (OCoLC)32434374
  identifier: 1089-8190
  record info:
    record content source: NYP
    record creation date: 021029
    record change date: 20151025101916.0
    record identifier: in00001780551